Microsystems Technology Laboratories

The MIT Microsystems Technology Laboratories (MTL) is an interdepartmental laboratory with a mission to foster research and education in semiconductor process and device technology and in integrated circuits and systems design. MTL provides microand nanofabrication and computer-aided design (CAD) infrastructure to the entire campus. MTL has 30 core faculty members who are engaged in diverse research areas related to electronic device fabrication, integrated circuits and systems, photonics, microelectromechanical systems (MEMS), and molecular and nanotechnologies. In addition, more than 110 affiliate faculty and senior research staff benefit from the fabrication facilities and CAD infrastructure provided by MTL. Last year, more than 500 researchers, primarily graduate students, conducted research using the MTL infrastructure. An underlying $55 million of annual sponsored research volume supports these fabrication and computational activities; sponsored programs administered directly through MTL have an annual research volume of approximately $12 million. MTL recovers approximately 75 percent of operating expense through charges to users and underwrites the remaining balance through use of unrestricted funds (approximately $1 million for FY2007).